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Enhancement of oxidation rate of a-Si nanoparticles during dehydrogenation

Oxidation of amorphous silicon (a-Si) nanoparticles grown by plasma-enhanced chemical vapor deposition were investigated. Their hydrogen content has a great influence on the oxidation rate at low temperature. When the mass gain is recorded during a heating ramp in dry air, an oxidation process at low temperature is identified with an onset around 250°C. This temperature onset is similar to that of hydrogen desorption. It is shown that the oxygen uptake during this process almost equals the number of hydrogen atoms present in the nanoparticles. To explain this correlation, we propose that oxidation at low temperature is triggered by the process of hydrogen desorption

American Institute of Physics

Author: Das, Debabrata
Farjas Silva, Jordi
Roura Grabulosa, Pere
Viera Mármol, Gregorio
Bertrán Serra, Enric
Abstract: Oxidation of amorphous silicon (a-Si) nanoparticles grown by plasma-enhanced chemical vapor deposition were investigated. Their hydrogen content has a great influence on the oxidation rate at low temperature. When the mass gain is recorded during a heating ramp in dry air, an oxidation process at low temperature is identified with an onset around 250°C. This temperature onset is similar to that of hydrogen desorption. It is shown that the oxygen uptake during this process almost equals the number of hydrogen atoms present in the nanoparticles. To explain this correlation, we propose that oxidation at low temperature is triggered by the process of hydrogen desorption
Document access: http://hdl.handle.net/2072/94947
Language: eng
Publisher: American Institute of Physics
Rights: Tots els drets reservats
Subject: Anàlisi tèrmica
Hidrogenació
Semiconductors amorfs
Silici -- Oxidació
Materials nanoestructurals
Amorphous semiconductors
Hydrogenation
Nanostructure materials
Silicon -- Oxidation
Thermal analysis
Title: Enhancement of oxidation rate of a-Si nanoparticles during dehydrogenation
Type: info:eu-repo/semantics/article
Repository: Recercat

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